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中微公司推介两款高端半导体微观加工设备新品|观热点

2026-10-14 20:08:47来源：证券时报  


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中微公司推介两款高端半导体微观加工设备新品人民财讯10月14日电，10月14日，中微公司在2026湾芯展推介最新发布的两款高端半导体微观加工设备——PrimoXD-RIE?极高深宽比刻蚀设备与PrefimaUnicore?AM12英寸ALD钼设备。据介绍，中微公司五年内将开发出二十多种新的高端薄膜设备，助力7纳米到3纳米以及更先进的逻辑器件和300层到500层以上及更先进的存储器件的需求。

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